Dry Pumps

▪ Dry multi-stage Roots technology
▪ No hydrocarbon vapors backstreaming: ACP series pump are free of lubricant inside the pumping module
▪ Constant perfomances (Pumping speed, max. and ultimate pressure)
▪ High reliability
▪ Low maintenance costs: no annual field service
▪ No particle contamination, thanks to frictionless design: no wearing parts

Applications

▪ Load-lock
▪ Transfer chambers
▪ Sputtering
▪ PVD
▪ Metrology