Evaporation System

▪ Chamber Size : ￠400 ~ ￠2000
▪ Boat : 1 ~ 4ea / Effusion Cell : 1 ~ 2ea
▪ Vacuum Pump : Turbo pump or Diffusion pump
▪ Basic Vacuum : 5.0 x 10-6 Torr
▪ Substrate Motion : Z - AXIS, Rotation
▪ Substrate Heating : Max 1000℃
▪ Substrate Size : Max 6 inch
▪ Control : Auto & Manual